\documentclass{jarticle}
\usepackage{slashbox}
\usepackage{multirow}

\begin{document}

\begin{center}
\begin{tabular}{|cc|ccc|c|c|}
\hline
\backslashbox[4zw]{}{}&投資産業&\multicolumn{3}{c|}{投入量}&\multirow{3}{5zw}{\hfill 最終需要\hfill }&\multirow{3}{5zw}{\hfill 生産量\hfill}\\
\cline{3-5}
生産産業&\backslashbox[4zw]{}{}&1&2&3&&\\
\hline
\multicolumn{2}{|c|}{1}&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
\multicolumn{2}{|c|}{2}&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
\multicolumn{2}{|c|}{3}&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}
\end{center}

\begin{center}
\begin{tabular}{|c|ccc|c|c|}
\hline
\backslashbox{生産産業}{投資産業}&\multicolumn{3}{c|}{%
\begin{tabular}{ccc}
\multicolumn{3}{c}{投入量}\\
\hline
1&2&3
\end{tabular}
}&最終需要&生産量\\
\hline
1&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
2&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
3&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}
\end{center}

\begin{center}
{\small
\begin{tabular}{|c|ccc|c|c|}
\hline
\backslashbox{生産産業}{投資産業}&\multicolumn{3}{c|}{%
\begin{tabular}{ccc}
\multicolumn{3}{c}{投入量}\\
\hline
1&2&3
\end{tabular}
}&最終需要&生産量\\
\hline
1&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
2&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
3&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}}
\end{center}

\begin{center}
{\small 
\begin{tabular}{|cc|ccc|c|c|}
\hline
\backslashbox{}{}&投資産業&\multicolumn{3}{c|}{投入量}&\multirow{3}{5zw}{\hfill 最終需要\hfill }&\multirow{3}{5zw}{\hfill 生産量\hfill}\\
\cline{3-5}
生産産業&\backslashbox{}{}&1&2&3&&\\
\hline
\multicolumn{2}{|c|}{1}&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
\multicolumn{2}{|c|}{2}&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
\multicolumn{2}{|c|}{3}&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}}
\end{center}

\begin{center}
{\small 
\begin{tabular}{|c|c|ccc|c|c|}
\hline
\backslashbox[4zw]{}{}&投資産業&\multicolumn{3}{c|}{投入量}&\multirow{3}{5zw}{\hfill 最終需要\hfill }&\multirow{3}{5zw}{\hfill 生産量\hfill}\\
\hline%\cline{3-5}
生産産業&\backslashbox[4zw]{}{}&1&2&3&&\\
\hline
\multicolumn{2}{|c|}{1}&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
\multicolumn{2}{|c|}{2}&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
\multicolumn{2}{|c|}{3}&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}}
\end{center}


\begin{center}
{\small 
\begin{tabular}{|cc|ccc|c|c|}
\hline
\backslashbox[2zw]{}{}&投資産業&\multicolumn{3}{c|}{投入量}&\multirow{3}{5zw}{\hfill 最終需要\hfill }&\multirow{3}{5zw}{\hfill 生産量\hfill}\\
\cline{3-5}
生産産業&\backslashbox[2zw]{}{}&1&2&3&&\\
\hline
\multicolumn{2}{|c|}{1}&$c_{11}$&$c_{12}$&$c_{13}$&$d_1$&$x_1$\\
\multicolumn{2}{|c|}{2}&$c_{21}$&$c_{22}$&$c_{23}$&$d_2$&$x_2$\\
\multicolumn{2}{|c|}{3}&$c_{31}$&$c_{32}$&$c_{33}$&$d_3$&$x_3$\\
\hline
\end{tabular}}
\end{center}



\end{document}
